Legacy and Discontinued Wafer Mapping Sensors

Legacy Products:
EX and WX mapping sensor models are available for copy exact replacements and Legacy applications.  Legacy models can be repaired.  Please contact technical support to request a Return Material Authorization.  RoHS compliant versions of EX models are in development. Please contact technical support for the latest information.

Discontinued Products:
The following HAMA models have been discontinued: ZX, DX, DT, DD, LR, WRM, DRM, ROX and RWX. These models can no longer be repaired.  Please contact technical support for current replacement model selection and installation advice.

Upgrade Information:
The EX-Q, EX-QS series of wafer mapping sensors can replace EX and WX wafer mapping sensors as well as discontinued HAMA Laboratories and HAMA Sensors models: ZX, DX, DT, DD, LR, WRM, DRM, ROX and RWX.  Current models are backward compatibility and deliver lower cost and higher performance than legacy and discontinued models.  Our applications engineers are ready to provide you model selection and installation advice.  For more information about upgrading click here or contact technical support.