WaferSense^® Auto Teaching System (ATS)
Wireless Machine Vision Teaching

Get a True Peek Inside Your Semiconductor Equipment. ATS “Sees” Inside Equipment to Accurately and Quickly Teach Wafer Transfer Positions.

Wireless and wafer-like, WaferSense ATS moves through semiconductor equipment, just as a wafer would, to capture three-dimensional offset data (x, y and z) for accurate calibration of transfer positions.

Because it is vacuum compatible, ATS can take measurements while equipment is sealed, saving you both qualification time and consumables. Our machine vision teaching instrument also helps you find lost or broken wafers, so you can service the correct portion of the tool.

Photo Gallery of WaferSense ATS

Features

• 450 mm wafer-like form factor.
• Onboard camera captures live video from inside semiconductor equipment to help you find lost or broken wafers.
• Onboard image processor reports the x-y-z offset from the teaching wafer to a target inside the equipment so you can teach wafer transfer coordinates.
• Accurate to ±0.1 mm (±0.004") x and y position; ±0.5 mm (±0.02") z position.
• Teaching wafer withstands exposure to 120°C air (five minutes or less) if not in direct contact with heat source so you can verify some handoff positions without cooling the tool.
• Vacuum compatible so troubleshooting takes less time as equipment stays sealed during inspection.
• TeachView™ software displays live video and measurements based on user defined targets, and logs offsets and user comments.
• TeachTarget™ software programs the teaching wafer to find circular features.