WaferSense™ Auto Leveling System
Wireless and Wafer-like Inclinometers

WaferSense is different... See why

Time to Put Away Your Bubble Levels. Our Automated Leveling Wafers Save you Valuable Time and Provides More Reliable Results.

Each ALS model is a wireless precision instrument that handles like a wafer to easily capture the inclination of previously out-of-reach semiconductor process equipment. Unlike traditional methods, WaferSense ALS doesn't require equipment disassembly or disruptions to vacuum chambers, so you can reduce your calibration time by 80% or more.

More accurate and less time-consuming than visual inspection, WaferSense ALS reduces setup time and preventative maintenance downtime by promptly delivering reliable, real-time measurements. Data captured with accompanying software also helps increase semiconductor yield.

	ALS Thin and light, WaferSense ALS reports tilt in two dimensions. Pitch and roll display allows quick, accurate leveling adjustments during tool setup and maintenance.
	ALS2 Even thinner than the ALS at only 6.3mm tall, WaferSense ALS2 can move to more stations automatically.
	ALSR WaferSense ALSR provides the same wireless ALS measurement accuracy and convenience in a reticle-like form factor.
	ALS2 Vertical In a vertical position, the ALS2 Vertical measures Ion Implant and copper plating angles, enabling tighter XYZ dimensions to compensate for the decrease in junction depths required by device scaling.