WaferSense™ Auto Gapping System (AGS)
Precision Wireless Gap Measurement
Close the Gaps in Your Fabrication Process. Our Gap Measurement Tool Improves Uniformity and Boosts Yield.
Improve uniformity and yield with wireless gap measurement system for accurate and repeatable setups.
WaferSense AGS, available in both 300 mm and 200 mm form factors, measures gaps critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. This wireless system improves uniformity and increases yield through objective and repeatable gap adjustments.
Our gapping system uses three non-contact distance sensors to return live gap measurements. Measurements are then displayed in real time on your laptop or PC in numerical and graphical form, which allows you to easily make the right adjustments time after time.
AGS300 has been adopted by Novellus for gapping the Novellus Vector tool as the gapping method of choice and BKM for 40% improvement in film uniformity.
Novellus Auto Showerhead Gap Application Note
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AGS300
Wireless and wafer-like, the gap measurement wafer can be handled automatically to speed equipment setup and maintenance, measuring gaps from 9 mm to 20 mm (0.35" to 0.79"). |
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AGS200
The same wireless and wafer-like features as the AGS 300, the AGS 200 now enables 200 mm fabs to implement the same advanced process control. |