Wafer Mapping Technology

Move Over Through-Beam. Our Wafer Mapping Sensors Offer the Quickest and Most Reliable Off-The-Shelf Wafer Detection.

Our wafer mappings sensors provide the best technology for the detection of semiconductor wafers and slotting errors in cassettes and FOUPs. They easily detect thin and dark coated wafers of any size and have no moving parts to keep aligned and/or result in particulate contamination.

Advanced optical technology delivers consistent apparent wafer thickness resulting in performance previously only thought possible with through-beam sensors.

EX-Q

Wafer Mapping Sensor EX-Q provides quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs.

EX-QS

Wafer Mapping Sensor EX-QS gives the same reliable wafer detection as the EX-Q in a smaller package.