Press Releases

Semiconductor International Names the WaferSense™ Auto Teaching System (ATS) from CyberOptics Semiconductor, Inc. a 2008 Editor's Choice for Best Product, July 2008

Novellus Systems Orders CyberOptics Semiconductor Metrology Tools To Maintain VECTOR Systems Used in 300 mm Fabs, April 2008

CyberOptics Semiconductor Sponsors ASMC 2008 Session on New Methods for Optimizing Semiconductor Equipment Productivity, April 2008

CyberOptics Semiconductor introduces WaferSense Auto Vibration System, designed to detect wafer-damaging equipment vibrations, November 2007
(ja-JP)

CyberOptics Semiconductor introduces WaferSense AGS200, designed to significantly improve film deposition, sputter and etch processing, September 2007
(zh-CN, ko-KR, ja-JP)

CyberOptics Semiconductor Introduces WaferSense Auto Leveling System 2
Wireless sensor enables greater wafer processing uniformity and real-time feedback
to improve throughput and yield, July 2007
(zh-CN, ko-KR, ja-JP)

CyberOptics Semiconductor introduces WaferSense™ Auto Gapping System that wirelessly measures gaps critical to semiconductor processing, July 2007
(zh-CN, ko-KR, ja-JP)

CyberOptics Semiconductor Introduces WaferSense™ Automatic Teaching System that wirelessly teaches wafer transfer positions, January 2007
(zh-CN, zh-MO, ko-KR, ja-JP)

CyberOptics Semiconductor Awarded US Patent for Sensor Product, September 2006

CyberOptics Semiconductor Introduces WaferSense™ Auto Leveling System for Reticles (ALSR) and adds Anodized Option to wafer-like WaferSense ALS, May 2006
(zh-CN, ko-KR, ja-JP)

CyberOptics Semiconductor EX-Q and EX-QS wafer mapping sensors provide reliable wafer detection in single wafer processing tool (Japanese), May 2006

CyberOptics Semiconductor announces availability of EX-QS Wafer Mapping Sensor, September 2005

Rudolph Technologies selects EX-Q Wafer Mapping Sensor for Use on Metrology tools, March 2005

CyberOptics Semiconductor Introduces WaferSense™ Auto Leveling Sensor, September 2004

Brooks Automation: Growing Profitability in Tough Times, December 2003

CyberOptics Semiconductor Announces the Release of the EX-Q Wafer Mapping Sensor, July 2003

CyberOptics Semiconductor Announces the Release of the EX Series of Wafer Mapping Sensors, May 2002

Imagenation Acquisition Press Release, October 2000

HAMA Sensors Acquisition Press Release, April 1999